Surface geometrical structure

Profilometr

Multisensor Altisurf 520 profilometer allows for contact and non-contact measurements of roughness parameters and surface topography.

The system parameters:

  • range of the X-axis – 200 mm,
  • range of the Y-axis – 200 mm,
  • range of the Z-axis – 200 mm,
  • 0.1 micrometer scale resolution.

Profilometer can work with two types of sensors including :

  • confocal sensor CL1:
    - Range: 130 microns,
    - Z-axis resolution: 8 nm,

  • confocal sensor CL2:
    - Range: 400 microns,
    - Z-axis resolution: 22 nm,

  • confocal sensor CL3
    - Range: 1,400 μm,
    - Z-axis resolution: 60 nm,

  • an interferometric sensor, characterized by a vertical range of from 0.5 to 90μm and Z-axis resolution of 0.5 nm;

In addition, the profilometer is equipped with heads:

  • microforce contact head with the C-Si-W tip which allows for low pressure measurements;
  • induction head with 2 micrometers pin radius;

The test stand allows measurement and analysis of all parameters of surface roughness and stereometry defined with standards: PN-EN ISO 4287, ISO 25178, ISO 13565-2 and ISO 13565-3.

 

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